TRITON

Single Wafer Platform

TRITON SINGLE WAFER PLATFORM

TRITON SINGLE WAFER PLATFORM

From its inception to the first delivery in 2013, the Triton platform was designed to be a stable but modular workhorse for all single-wafer wet-processes.

The modular build of our tools enables our customer to configure the tool for a mass-production single-process tool as well as a swiss-army knife R&D or prototyping tool – without affecting performance or reliability.

FRAMEWORKS

Within the modular frame-work, we keep innovating the platform.

Our customers can choose to equip their tool with the High-Speed Plating System in favor of a traditional fountain plater, or with an upper chamber that allows pre-wetting as well as a final rinse/dry above the plating chamber without needing a robot move.

FLEXIBILITY

We provide our customers with the most flexibility. Tools can be made ready to support additional chambers and/or tanks, so it will grow with your process needs. Our modular thinking makes it possible that newly developed chambers can be added to existing tools with space for expansion, future-proofing our customer’s investment.

TRITON CUSTOMER ADDED VALUES

Excellent speed and quality track record
Custome- and future-proof
Highly innovized to our customer’s needs
Possibility of processing more than one substrate size per chamber with minimal or no reconfiguration
Modular platform
Upgradative new wet processes
Established high-throughput processing chambers

TRITON HIGHLIGHTS

Processing of 3” to 450 mm substrates
Possibility of processing two to three different substrate sizes with minimal or no reconfiguration – and no requalification of the chamber
Patented High-Speed Plating for better throughput and better uniformity – without changing the chemistry
Industry 4.0 ready – control and monitor all process parameters
Plating uniformity 3% or better
Etch uniformity 3% or better
Online dosing system
Online chemical monitoring
Online gas detection for safety
End-point detection for many etch processes