AUTOMATED TRITONFor production purpose
SEMI-AUTOMATED TRITONFor pilot line purpose
Europe | Austria | Salzburg
T: +43 662 222 10
F: +43 662 222 180
From its inception to the first delivery in 2013, the Triton platform was designed to be a stable but modular workhorse for all single-wafer wet-processes.
The modular build of our tools enables our customer to configure the tool for a mass-production single-process tool as well as a swiss-army knife R&D or prototyping tool – without affecting performance or reliability.
Within the modular frame-work, we keep innovating the platform.
Our customers can choose to equip their tool with the High-Speed Plating System in favor of a traditional fountain plater, or with an upper chamber that allows pre-wetting as well as a final rinse/dry above the plating chamber without needing a robot move.
We provide our customers with the most flexibility. Tools can be made ready to support additional chambers and/or tanks, so it will grow with your process needs. Our modular thinking makes it possible that newly developed chambers can be added to existing tools with space for expansion, future-proofing our customer’s investment.
ELECTRO CHEMICAL DEPOSITION