Triton A

– Spray Acid Chamber –

:: Clean
:: Metal Etch
:: Oxide Etch
:: Barrier Strip
:: PR Strip (Ozone)
:: Post Ash Clean (Ozone)

Triton S

– Spray Solvent Chamber –

:: PR Strip
:: Flux Strip
:: Poly Removal
:: Metal Lift-off

Triton EDC

– Electro Deposition Chamber –

:: Modern Fountain Plating Cell
:: Cu, Ni, Au, Solders, Alloys
:: Pads, Lines, Pillars, Bumps, etc.
:: Multiple Metal Capability
:: Optional Bath Management

Triton UBM

– UBM Etch Chamber –

:: Modern Fountain Plating Cell
:: End Point Detection
:: Metal and alloy etch
:: Multiple etchants
:: Contact wafer handling (Bernoulli)