Galaxy Format

Fully Automated Batch Platform

About

The SEMSYSCO Galaxy fully automated Batch Processing System is a highly space-efficient, highly modifiable acid, solvent, and ozone processing platform. The batch process chambers utilize on-axis spray technology to provide unmatched process efficiency and uniformity results. The process modules offer high throughput in a small footprint, simple operator controls and reliable design. Due to its high level of configuration flexibility, the Galaxy can be tailored to nearly any application. The Galaxy Batch Processing System provides low cost of ownership through its small footprint, low maintenance requirements and completely self-contained design. The platform can be configured with multiple process chambers to meet any capacity requirement.

 

 

 

 

 

 

 

 

 

 

 

 

 

Configurations

The platform can be configured with multiple process chambers covering etch, clean and stripping processes in one system.

The SAP (Spray Acid Processor) Process Chamber is contained in a powder-coated stainless steel cabinet in which all fluid handling components, tanks, pumps, valves and plumbing are contained. Panelling is made from PP sheeting, FM4910 material is also an option. All fluid control components, electrical and mechanical, are contained in the module. Multiple SAP chamber systems are configurable to execute an extended process integration sequence or can simply be equipped with multiple duplicate chambers for high volume production.

The SSP (Spray Solvent Processor) Process Chamber is contained in a stainless steel cabinet in which all fluid handling components, tanks, pumps, valves and plumbing are contained. All fluid control components, electrical and mechanical, are contained in the module. Multiple chamber systems are available.

The SOP (Spray Ozone Processor) Process Chamber is contained in a powder-coated stainless steel cabinet in which all fluid handling components, tanks, pumps, valves and plumbing are contained. Panelling is made from PP sheeting, FM4910 material is also an option. All fluid control components, electrical and mechanical, are contained in the module. Internal ozone generators are optional, external generators are standard.

Benefits

The fully automated Galaxy Batch Processing System utilizes on-axis spray technology to provide unmatched process efficiency and uniformity results. The process modules offer high throughput in a small footprint, simple operator controls and reliable design. Spray technology reduces the amount of required DIW consumption by as much as 80% compared to standard processing. Due to its high level of configuration flexibility, the Galaxy can be tailored to nearly any application. The Galaxy Batch Processing System provides low cost of ownership through its small footprint, low maintenance requirements and completely self-contained design. The platform can be configured with multiple process chambers to meet any capacity requirement.

Features

:: Multi Process Capability
:: Full Automation
:: 150/200/300mm Process capability within one system
:: 25 & 50 Wafer Process Batch Sizes
:: Advanced Data Logging and Viewing
:: Etch Uniformity Performance <5%
:: Industry leading DIW consumption